Feb. 11, 1953 - July 29, 2014
Resident of San Jose
David W. Benzing unexpectedly passed away Tuesday July 29, 2014, with his family at his side He was 61.
A Silicon Valley entrepreneur and Semiconductor Industry expert in plasma systems and processes for semiconductor devices born in Perth Amboy, NJ, Dave became interested in Science and Athletics early in life. While attending Saratoga High School he received the Grand Prize at the 12th Annual Santa Clara County Science Fair and took third place at the International Science Fair that year held in Kansas City, MO.
He received a Bachelor of Science degree in Chemical Engineering with Honors from University of California Berkley in 1975. He then went on to pursue a Doctorate in Chemical Engineering from Princeton University, his father's alma mater. In 1978 he joined Signetics Corporation working in plasma etch development for their Advanced Technology Center in Sunnyvale.
After holding leadership positions at both Applied Materials Inc and Anelva Corporation, in 1984 Dave and his brother, Jeff Benzing, founded Benzing Technologies of San Jose, which developed the industry's first stand-alone in-situ plasma based cleaning system for hot-wall LPCVD reactors.
In 2000 he founded Innovative Silicon Systems providing reactor design and process development consulting services to semiconductor equipment and device manufacturers. He also was very active in the design, development, and manufacturing of innovative productivity enhancement tools for semiconductor processing.
Mr. Benzing held nine U.S. patents for his work in the area of processes and equipment for semiconductor device manufacturing including both plasma etching and in-situ plasma cleaning.
An avid lover of animals, David would be a frequent visitor to the local zoo in any city that he would find himself in during his travels.
Mr. Benzing is survived by his son Thor Benzing, his daughter Allison Benzing, and brothers, Steve and Jeff Benzing.
A Celebration of Life will be held on Saturday August 16 from 3 to 5pm at the family home of Steve Benzing, 12403 Fredericksburg Dr., Saratoga, CA.
Contributions in-lieu of flowers may be sent on behave of David W. Benzing to the Happy Hollow Park and Zoo in San Jose, CA.
Published in San Jose Mercury News/San Mateo County Times on Aug. 9, 2014